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Agilent E4980A Precision LCR Meter
20 Hz to 2 MHz
Data Sheet
Fully compliant to LXI Class C specification
Definitions
All specifications apply to the conditions of a 0 to 55 C temperature range, unless otherwise stated, and 30 minutes after the instrument has been turned on. Specifications (spec.): Warranted performance. Specifications include guardbands to account for the expected statistical performance distribution, measurement uncertainties, and changes in performance due to environmental conditions. Supplemental information is provided as information that is useful in operating the instrument, but is not covered by the product warranty. This information is classified as either typical or nominal. Typical (typ.): Expected performance of an average unit without taking guardbands into account. Nominal (nom.): A general descriptive term that does not imply a level of performance.
How to Use Tables
When measurement conditions fall under multiple categories in a table, apply the best value. For example, basic accuracy Ab is 0.10% under the following conditions; Measurement time mode Test frequency Test signal voltage SHORT 125 Hz 0.3 Vrms
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Basic Specifications
Measurement functions
Measurement parameters
* * * * * * * * * Cp-D, Cp-Q, Cp-G, Cp-Rp Cs-D, Cs-Q, Cs-Rs Lp-D, Lp-Q, Lp-G, Lp-Rp, Lp-Rdc1 Ls-D, Ls-Q, Ls-Rs, Ls-Rdc1 R-X Z-d, Z-r G-B Y-d, Y-r Vdc-Idc1
Definitions
Cp Cs Lp Ls D Q G Rp Rs Rdc R X Z Y d r B Vdc Idc Capacitance value measured with parallel-equivalent circuit model Capacitance value measured with series-equivalent circuit model Inductance value measured with parallel-equivalent circuit model Inductance value measured with series-equivalent circuit model Dissipation factor Quality factor (inverse of D) Equivalent parallel conductance measured with parallel-equivalent circuit model Equivalent parallel resistance measured with parallel-equivalent circuit model Equivalent series resistance measured with series-equivalent circuit model Direct-current resistance Resistance Reactance Impedance Admittance Phase angle of impedance/admittance (degree) Phase angle of impedance/admittance (radian) Susceptance Direct-current voltage Direct-current electricity
Deviation measurement function: Deviation from reference value and percentage of deviation from reference value can be output as the result. Equivalent circuits for measurement: Parallel, Series Impedance range selection: Auto (auto range mode), manual (hold range mode) Trigger mode: Internal trigger (INT), manual trigger (MAN), external trigger (EXT), GPIB trigger (BUS)
1. Option E4980A-001 is required.
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Table 1. Trigger delay time
Range Resolution 0 s - 999 s 100 s (0 s - 100 s) 1 ms (100 s - 999 s)
Table 2. Step delay time
Range Resolution 0 s - 999 s 100 s (0 s - 100 s) 1 ms (100 s - 999 s)
Measurement terminal: Four-terminal pair Test cable length: 0 m, 1 m, 2 m, 4 m Measurement time modes: Short mode, medium mode, long mode.
Table 3. Averaging
Range Resolution 1 - 256 measurements 1
Test signal
Table 4. Test frequencies
Test frequencies Resolution 20 Hz - 2 MHz 0.01 Hz (20 Hz - 99.99 Hz) 0.1 Hz (100 Hz - 999.9 Hz) 1 Hz (1 kHz - 9.999 kHz) 10 Hz (10 kHz - 99.99 kHz) 100 Hz (100 kHz - 999.9 kHz) 1 kHz (1 MHz - 2 MHz) 0.01%
Measurement accuracy
Table 5. Test signal modes
Normal Constant Program selected voltage or current at the measurement terminals when they are opened or short-circuited, respectively. Maintains selected voltage or current at the device under test (DUT) independently of changes in impedance of DUT.
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Signal level Table 6. Test signal voltage
Range Resolution 0 Vrms - 2.0 Vrms 100 Vrms (0 Vrms - 0.2 Vrms) 200 Vrms (0.2 Vrms - 0.5 Vrms) 500 Vrms (0.5 Vrms - 1 Vrms) 1 mVrms (1 Vrms - 2 Vrms) (10% + 1 mVrms) Test frequency 1 MHz: spec. Test frequency > 1 MHz: typ. (6% + 1 mVrms) Test frequency 1 MHz: spec. Test frequency > 1 MHz: typ.
Accuracy
Normal Constant1
Table 7. Test signal current
Range Resolution 0 Arms - 20 mArms 1 Arms (0 Arms - 2 mArms) 2 Arms (2 mArms - 5 mArms) 5 Arms (5 mArms - 10 mArms) 10 Arms (10 mArms - 20 mArms) (10% + 10 Arms) Test frequency 1 MHz: spec. Test frequency > 1 MHz: typ. (6% + 10 Arms) Test frequency < = 1 MHz: spec. Test frequency > 1 MHz: typ.
Accuracy
Normal Constant1
Output impedance: 100 (nominal)
Test signal level monitor function
* Test signal voltage and test signal current can be monitored. * Level monitor accuracy:
Table 8. Test signal voltage monitor accuracy (Vac)
Test signal voltage2 5 mVrms - 2 Vrms Test frequency 1 MHz > 1 MHz Specification (3% of reading value + 0.5 mVrms) (6% of reading value + 1 mVrms)
Table 9. Test signal current monitor accuracy (lac)
Test signal current2 50 Arms - 20 mArms Test frequency 1 MHz > 1 MHz Specification (3% of reading value + 5 Arms) (6% of reading value + 10 Arms)
1. When auto level control function is on. 2. This is not an output value but rather a displayed test signal level.
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Measurement display ranges
Table 10 shows the range of measured value that can be displayed on the screen. For the effective measurement ranges, refer to Figure 1. impedance measurement accuracy example .
Table 10. Allowable display ranges for measured values
Parameter Cs, Cp Ls, Lp D Q R, Rs, Rp, X, Z, Rdc G, B, Y Vdc Idc r d % Measurement display range 1.000000 aF to 999.9999 EF 1.000000 aH to 999.9999 EH 0.000001 to 9.999999 0.01 to 99999.99 1.000000 a to 999.9999 E 1.000000 aS to 999.9999 ES 1.000000 aV to 999.9999 EV 1.000000 aA to 999.9999 EA 1.000000 arad to 3.141593 rad 0.0001 deg to 180.0000 deg 0.0001 % to 999.9999 %
a: 1 x 10-18, E: 1 x 1018
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Absolute measurement accuracy
The following equations are used to calculate absolute accuracy. Absolute accuracy Aa of |Z|, |Y|, L, C, R, X, G, B (L, C, X, and B accuracies apply when Dx 0.1, R and G accuracies apply when Qx 0.1 ) Equation 1. Aa Ae Acal Aa = Ae + Acal
Absolute accuracy (% of reading value) Relative accuracy (% of reading value) Calibration accuracy (%)
where G accuracy is applied only to G-B measurements.
D accuracy (when Dx 0.1) Equation 2. Dx De cal De + cal
Measured D value Relative accuracy of D Calibration accuracy of (radian)
Q accuracy (When Qx x Da < 1) Equation 3.
2x (Qx Da) (1 Qx x Da)
Qx Da
Measured Q value Absolute accuracy of D
accuracy Equation 4. e cal e + cal
Relative accuracy of (degree) Calibration accuracy of (degree)
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G accuracy (when Dx 0.1) Equation 5. Bx + Da (S) Bx = 2fCx = 1 2fLx
Dx Bx Da f Cx Lx
Measured D value Measured B value (S) Absolute accuracy of D Test frequency (Hz) Measured C value (F) Measured L value (H)
where the accuracy of G is applied to Cp-G measurements.
Absolute accuracy of Rp (when Dx 0.1) Equation 6. Rpx x Da Dx Da ()
Rpx Dx Da
Measured Rp value () Measured D value Absolute accuracy of D
Absolute accuracy of Rs (when Dx 0.1) Equation 7. () 1 Xx = = 2fLx 2fCx Xx x Da
Dx Xx Da f Cx Lx
Measured D value Measured X value () Absolute accuracy of D Test frequency (Hz) Measured C value (F) Measured L value (H)
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Relative accuracy
Relative accuracy includes stability, temperature coefficient, linearity, repeatability, and calibration interpolation error. Relative accuracy is specified when all of the following conditions are satisfied: * Warm-up time: 30 minutes * Test cable length: 0 m, 1 m, 2 m, or 4 m (Agilent 16047A/B/D/E) * A "Signal Source Overload" warning does not appear. When the test signal current exceeds a value in table 11 below, a "Signal Source Overload" warning appears.
Table 11.
Test signal voltage 2 Vrms > 2 Vrms Test frequency - 1 MHz > 1 MHz Vac [V] Fm [Hz] L_cable [m] Test signal voltage Test frequency Cable length Condition1 - the smaller value of either 110 mA or 130 mA - 0.0015 x Vac x (Fm / 1 MHz) x (L_cable + 0.5) 70 mA - 0.0015 x Vac x (Fm / 1 MHz) x (L_cable + 0.5)
* OPEN and SHORT corrections have been performed. * Bias current isolation: Off * The DC bias current does not exceed a set value within each range of the DC bias current * The optimum impedance range is selected by matching the impedance of DUT to the effective measuring range. * Under an AC magnetic field, the following equation is applied to the measurement accuracy. A x ( 1 + B x ( 2 + 0.5 / Vs)) Where A: Absolute accuracy B: Magnetic flux density [Gauss] Vs: Test signal voltage level [Volts] |Z|, |Y|, L, C, R, X, G, and B accuracy (L, C, X, and B accuracies apply when Dx 0.1, R and G accuracies apply Qx 0.1) Relative accuracy Ae is given as: Equation 8. Zm Ab Zs Yo Kt Ae = [Ab + Zs /|Zm| x 100 + Yo x |Zm| x 100 ] x Kt
Impedance of DUT Basic accuracy Short offset Open offset Temperature coefficient
D accuracy D accuracy De is given as * when Dx 0.1 Equation 9. Dx Ae
1. When the calculation result is a negative value, 0 A is applied.
De = Ae/100
Measured D value Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
* when Dx > 0.1, multiply De by (1 + Dx)
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Q accuracy (when Q x De < 1) Q accuracy Qe is given as: Equation 10. Qx De Qe = (Qx2 x De) (1 Qx x De)
Measured Q value Relative D accuracy
accuracy accuracy e is given as: Equation 11. e = 180 x Ae x 100 Ae
(deg)
Relative accuracies of |Z|, |Y|, L, C, R, X, G, and B
G accuracy (when Dx 0.1) G accuracy Ge is given as: Equation 12. (S) 1 Bx = 2fCx = 2fLx Ge = Bx x De
Ge Dx Bx De f Cx Lx
Relative G accuracy Measured D value Measured B value Relative D accuracy Test frequency Measured C value (F) Measured L value (H)
Rp accuracy (when Dx 0.1) Rp accuracy Rpe is given as: Equation 13. Rpe Rpx Dx De Rpe = Rpx x De Dx De ()
Relative Rp accuracy Measured Rp value () Measured D value Relative D accuracy
Rs accuracy (when Dx 0.1) Rs accuracy Rse is given as: Equation 14. Rse = Xx x De () 1 Xx = = 2fLx 2fCx
Rse Dx Xx De f Cx Lx
Relative Rs accuracy Measured D value Measured X value () Relative D accuracy Test frequency (Hz) Measured C value (F) Measured L value (H)
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Example of C-D accuracy calculation Measurement conditions
Test Frequency: Measured C value: Test signal voltage: Measurement time mode: Measurement temperature: 1 kHz 100 nF 1 Vrms Medium 23 C
Ab = 0.05% |Zm| = 1 / (2 x 1 x 103 x 100 x 10-9) = 1590 Zs = 0.6 m x (1 + 0.400/1) x (1 + (1000/1000) = 1.68 m Yo = 0.5 nS x (1 + 0.100/1) x (1 + (100/1000) = 0.72 nS C accuracy: Ae = [0.05 + 1.68 m/1590 x 100 + 0.72 n x 1590 x 100] x 1 = 0.05% D accuracy: De = 0.05/100 = 0.0005
Basic accuracy
Basic accuracy Ab is given below.
Table 12. Measurement time mode = SHORT
Test signal voltage Test frequency [Hz] 20 - 125 125 - 1 M 1M-2M 5 mVrms 50 mVrms (0.6%) x (50 mVrms/Vs) (0.2%) x (50 mVrms/Vs) (0.4%) x (50 mVrms/Vs) 50 mVrms 0.3 Vrms 0.60% 0.20% 0.40% 0.3 Vrms 1 Vrms 0.30% 0.10% 0.20% 1 Vrms 10 Vrms 0.30% 0.15% 0.30% 10 Vrms 20 Vrms 0.30% 0.15% 0.30%
Table 13. Measurement time mode = MED, LONG
Test signal voltage Test frequency [Hz] 20 - 100 100 - 1 M 1M-2M 5 mVrms 50 mVrms (0.25%) x (30 mVrms/Vs) (0.1%) x (30 mVrms/Vs) (0.2%) x (30 mVrms/Vs) Test signal voltage 50 mVrms 0.3 Vrms 0.25% 0.10% 0.20% 0.3 Vrms 1 Vrms 0.10% 0.05% 0.10% 1 Vrms 10 Vrms 0.15% 0.10% 0.20% 10 Vrms 20 Vrms 0.15% 0.15% 0.30%
Vs [Vrms]
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Effect by impedance of DUT Table 14. For impedance of DUT below 30 , the following value is added.
Test frequency [Hz] 20 - 1 M 1M-2M Impedance of DUT 1.08 |Zx| < 30 |Zx| < 1.08 0.05% 0.10% 0.10% 0.20%
Table 15. For impedance of DUT over 9.2 k , the following value is added.
Test frequency [Hz] 10 k - 100 k 100 k - 1 M 1M-2M Impedance of DUT 9.2 k < |Zx| 92 k 92 k < |Zx| 0% 0.05% 0.05% 0.05% 0.10% 0.10%
Effect of cable extension
When the cable is extended, the following element is added per one meter. 0.015 % x (Fm/1 MHz)2 x (L_cable)2 Fm [Hz] L_cable [m] Test Frequency Cable length
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Short offset Zs
Table 16. Impedance of DUT > 1.08
Test frequency [Hz] 20 - 2 M Measurement time mode SHORT MED, LONG 2.5 m x (1 + 0.400/Vs) x 0.6 m x (1 + 0.400/Vs) x (1 + (1000/Fm)) (1 + (1000/Fm))
Table 17. Impedance of DUT 1.08
Test frequency [Hz] 20 - 2 M Measurement time mode SHORT MED, LONG 1 m x (1 + 1/Vs) x 0.2 m x (1 + 1/Vs) x (1 + (1000/Fm)) (1 + (1000/Fm)) Test signal voltage Test frequency
Vs [Vrms] Fm [Hz]
Effect of cable extension (Short offset) Table 18. When the cable is extended, the following value is added to Zs (independent of the measurement time mode).
Test frequency [Hz] 20 - 1 M 1M-2M 0m 0 0 Cable length 1m 0.25 m 1 m 2m 0.5 m 2 m 4m 1 m 4 m
Open offset Yo
Table 19. Test signal voltage 2.0 Vrms
Test frequency [Hz] 20 - 100 k 100 k - 1 M 1M-2M Measurement time mode SHORT MED, LONG 2 nS x (1 + 0.100/Vs) x 0.5 nS x (1 + 0.100/Vs) x (1 + (100/Fm)) (1 + (100/Fm)) 20 nS x (1 + 0.100/Vs) 5 nS x (1 + 0.100/Vs) 40 nS x (1 + 0.100/Vs) 10 nS x (1 + 0.100/Vs)
Table 20. Test signal voltage > 2.0 Vrms
Test frequency [Hz] 20 - 100 k 100 k - 1 M 1M-2M Measurement time mode SHORT MED, LONG 2 nS x (1 + 2/Vs) x 0.5 nS x (1 + 2/Vs) x (1 + (100/Fm)) (1 + (100/Fm)) 20 nS x (1 + 2/Vs) 5 nS x (1 + 2/Vs) 40 nS x (1 + 2/Vs) 10 nS x (1 + 2/Vs) Test signal voltage Test frequency
Note
The Open Offset may become three times greater in the ranges of 40 to 70 kHz and 80 to 100 kHz due to residual response.
Vs [Vrms] Fm [Hz]
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Effect of cable length Table 21. When the cable is extended, multiply Yo by the following factor.
Test frequency [Hz] 100 - 100 k 100 k - 1 M 1M-2M Fm [Hz] 0m 1 1 1 Cable length 1m 2m 1 + 5 x Fm/1 MHz 1 + 10 x Fm/1 MHz 1 + 0.5 x Fm/1 MHz 1 + 1 x Fm/1 MHz 1 + 1 x Fm/1 MHz 1 + 2 x Fm/1 MHz 4m 1 + 20 x Fm/1 MHz 1 + 2 x Fm/1 MHz 1 + 4 x Fm/1 MHz
Test frequency
Temperature factor Kt Table 22. The temperature factor Kt is given below.
Temperature [C] 0 - 18 18 - 28 28 - 55 Kt 4 1 4
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Calibration accuracy Acal
Calibration accuracy Acal is given below. For impedance of DUT on the boundary line, apply the smaller value.
Table 23. Impedance range = 0.1, 1, 10
20 - 1 k 0.03 1 k - 10 k 0.05 2 x 10-4 Test frequency [Hz] 10 k -100 k 100 k - 300 k 0.05 0.05 + 5 x 10-5 Fm -4 3 x 10 3 x 10-4 + 2 x 10-7 Fm 300 k - 1 M 0.05 + 5 x 10-5 Fm 3 x 10-4 + 2 x 10-7 Fm 1M-2M 0.1 + 1 x 10-4 Fm 6 x 10-4 + 4 x 10-7 Fm
|Z| [%]
[radian] 1 x 10-4
Table 24. Impedance range = 100
20 - 1 k 0.03 1 k - 10 k 0.05 Test frequency [Hz] 10 k -100 k 100 k - 300 k 0.05 0.05 + 5 x 10-5 Fm 3 x 10-4 3 x 10-4 300 k - 1 M 0.05 + 5 x 10-5 Fm 3 x 10-4 1M-2M 0.1 + 1 x 10-4 Fm 6 x 10-4
|Z| [%]
[radian] 1 x 10-4 2 x 10-4
Table 25. Impedance range = 300, 1 k
20 - 1 k |Z| [%] 0.03 [radian] 1 x 10-4 1 k - 10 k 0.03 1 x 10-4 Test frequency [Hz] 10 k -100 k 100 k - 300 k 0.05 0.05 3 x 10-4 3 x 10-4 300 k - 1 M 0.05 3 x 10-4 1M-2M 0.1 6 x 10-4
Table 26. Impedance range = 3 k, 10 k
20 - 1 k |Z| [%] 0.03 + 1 x 10-4 Fm [radian] (100 + 2.5 Fm) x 10-6 Test frequency [Hz] 1 k - 10 k 10 k -100 k 100 k - 300 k 0.03 + 0.03 + 0.03 + 1 x 10-4 Fm 1 x 10-4 Fm 1 x 10-4 Fm (100 + (100 + (100 + 2.5 Fm) x 10-6 2.5 Fm) x 10-6 2.5 Fm) x 10-6 300 k - 1 M 0.03 + 1 x 10-4 Fm (100 + 2.5 Fm) x 10-6 1M-2M 0.06 + 2 x 10-4 Fm (200 + 5 Fm) x 10-6
Table 27. Impedance range = 30 k, 100 k
20 - 1 k |Z| [%] 0.03 + 1 x 10-3 Fm [radian] (100 + 20 Fm) x 10-6 Test frequency [Hz] 1 k - 10 k 10 k -100 k 100 k - 300 k 0.03 + 0.03 + 0.03 + 1 x 10-3 Fm 1 x 10-3 Fm 1 x 10-3 Fm (100 + (100 + (100 + 20 Fm) x 10-6 20 Fm) x 10-6 20 Fm) x 10-6 300 k - 1 M 1 M - 2 M 0.03 + 0.06 + 1 x 10-4 Fm 2 x 10-4 Fm (100 + (200 + 2.5 Fm) x 10-6 5 Fm) x 10-6
Fm[kHz] Test frequency
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Measurement accuracy
The impedance measurement calculation example below is the result of absolute measurement accuracy.
1p H 10 0k H 10 f kH 10 0a 0H
10
1n
1G
pF
F
1M
0f
F
10
F
10
1f
F
1k
H
F
10
10
10n 100M
0p
F
10.0%
10
H
1n
100n 10M
F
1.0% 0.3%
1H
10
1 1M
nF
10
0m
H
10
10 100k
0n F
0.1%
10
m
H
1
100 10k
F
1m
H
[S]
[]
10
1k
1m
C
F
10
0
H
10
10m 100
0
F
10
H
0.1%
1 H
1m
100m 10
F
10
1 1
m
F
10
0n
H
0.3%
10
10 100m
0m
F
10
nH
1.0%
1F 1n H
100
10m
10.0%
10
10 1m 20 100 1k 10k 100k 1M 2M
0p
H
Frequency [ Hz ]
Figure 1. Impedance measurement accuracy (Test signal voltage = 1 Vrms, cable length=0 m, measurement time mode = MED)
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Compensation function
Table 28. The E4980A provides three types of compensation functions: OPEN compensation, SHORT compensation, and LOAD compensation.
Type of compensation
OPEN compensation SHORT compensation LOAD compensation
Description
Compensates errors caused by the stray admittance (C, G) of the test fixture. Compensates errors caused by the residual impedance (L, R) of the test fixture. Compensates errors between the actual measured value and a known standard value under the measurement conditions desired by the user.
List sweep
Points: There is a maximum of 201 points. First sweep parameter (primary parameter): Test frequency, test signal voltage, test signal current, test signal voltage of DC bias signal, test signal current of DC bias signal, DC source voltage. Note
A parameter selected for one of the two parameters cannot be selected for the other parameter. It is not possible to set up a combination of test signal voltage and test signal current or one of test signal voltage of DC bias signal and test signal current of DC bias. The secondary parameter can be set only with SCPI commands.
Second sweep parameter (secondary parameter): None, impedance range, test frequency, test signal voltage, test signal current, test signal voltage of DC bias signal, test signal current of DC bias signal, DC source voltage
Trigger mode
Sequential mode: When the E4980A is triggered once, the device is measured at all sweep points. /EOM/INDEX is output only once. Step mode: The sweep point is incremented each time the E4980A is triggered. /EOM/INDEX is output at each point, but the result of the comparator function of the list sweep is available only after the last /EOM is output.
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Comparator function of list sweep: The comparator function enables setting one pair of lower and upper limits for each measurement point. You can select from: Judge with the first sweep parameter/Judge with the second parameter/Not used for each pair of limits. Time stamp function: In the sequential mode, it is possible to record the measurement starting time at each measurement point by defining the time when FW detects a trigger as 0 and obtain it later with the SCPI command.
Comparator function
Bin sort: The primary parameter can be sorted into 9 BINs, OUT_OF_BINS, AUX_BIN, and LOW_C_REJECT. The secondary parameter can be sorted into HIGH, IN, and LOW. The sequential mode and tolerance mode can be selected as the sorting mode. Limit setup: Absolute value, deviation value, and % deviation value can be used for setup. BIN count: Countable from 0 to 999999.
DC bias signal
Table 29. Test signal voltage
Range Resolution Accuracy 0 V to +2 V 0 V / 1.5 V / 2 V only 0.1% + 2 mV (23 C 5 C) (0.1% + 2 mV) x 4 (0 to 18 C or 28 to 55 C)
Output impedance: 100 (nominal)
Measurement assistance functions
Data buffer function: Up to 201 measurement results can be read out in a batch. Save/Recall function: * Up to 10 setup conditions can be written to/read from the built-in non-volatile memory. * Up to 10 setup conditions can be written to/read from the USB memory. * Auto recall function can be performed when the setting conditions are written to Register 10 of the USB memory. Key lock function: The front panel keys can be locked. Note
The following USB memory can be used. Complies with USB 1.1; mass storage class, FAT16/FAT32 format; maximum consumption current is below 500 mA. Recommended USB memory: 512 MB USB Flash memory (Agilent PN 1819-0195). Use the recommended USB memory device exclusively for the E4980A, otherwise, previously saved data may be cleared. If you use a USB memory other than the recommended device, data may not be saved or recalled normally. Agilent Technologies will NOT be responsible for data loss in the USB memory caused by using the E4980A.
GPIB: 24-pin D-Sub (Type D-24), female; complies with IEEE488.1, 2 and SCPI. USB host port: Universal serial bus jack, type-A (4 contact positions, contact 1 is on your left), female (for connection to USB memory only). USB interface port: Universal serial bus jack, type mini-B (4 contact positions); complies with USBTMC-USB488 and USB 2.0; female; for connection to the external controller. USBTMC: Abbreviation for USB Test & Measurement Class LAN: 10/100 BaseT Ethernet, 8 pins (two speed options) LXI Compliance: Class C (only applies to units with firmware revision A.02.00 or later)
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Options
Note
Option xxx is described as E4980A-xxx in the order information
The following options are available for the E4980A LCR Meter.
Option 001 (Power and DC bias enhancement)
Increases test signal voltage and adds the variable DC bias voltage function.
Measurement parameters
The following parameters can be used. * Lp-Rdc * Ls-Rdc * Vdc-Idc where Rdc Vdc Idc Direct-current resistance (DCR) Direct-current voltage Direct-current electricity
Test signal
Signal level Table 30. Test signal voltage
Range Resolution 0 Vrms to 20 Vrms (test frequency 1 MHz) 0 Vrms to 15 Vrms (test frequency > 1 MHz) 100 Vrms (0 Vrms - 0.2 Vrms) 200 Vrms (0.2 Vrms - 0.5 Vrms) 500 Vrms (0.5 Vrms - 1 Vrms) 1 mVrms (1 Vrms - 2 Vrms) 2 mVrms (2 Vrms - 5 Vrms) 5 mVrms (5 Vrms - 10 Vrms) 10 mVrms (10 Vrms - 20 Vrms) normal (10% + 1 mVrms) (test signal voltage 2 Vrms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) (10% + 10 mVrms) (Test frequency 300 kHz, test signal voltage > 2 Vrms) (spec.) (15% + 20 mVrms) (test frequency > 300 kHz, test signal voltage > 2 Vrms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) (6% + 1 mVrms) (test signal voltage 2 Vrms) (test frequency 1 MHz : spec. , test frequency > 1 MHz : typ.) (6% + 10 mVrms) (test frequency 300 kHz, test signal voltage > 2 Vrms) (spec.) (12% + 20 mVrms) (test frequency > 300 kHz, test signal voltage > 2 Vrms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Setup accuracy
Constant1
1. When auto level control function is on.
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Table 31. Test signal current
Range Resolution 0 Arms - 100 mArms 1 Arms (0 Arms - 2 mArms) 2 Arms (2 mArms - 5 mArms) 5 Arms (5 mArms - 10 mArms) 10 Arms (10 mArms - 20 mArms) 20 Arms (20 mArms - 50 mArms) 50 Arms (50 mArms - 100 mArms) normal (10% + 10 Arms) (test signal voltage 20 mArms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) (10% + 100 Arms) (test frequency 300 kHz, test signal current > 20 mArms) (spec.) (15% + 200 Arms) (test frequency > 300 kHz, test signal voltage > 20 mArms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.) (6% + 10 Arms) (test signal voltage 20 mArms) (test frequency 1 MHz : spec. , test frequency > 1 MHz : typ.) (6% + 100 Arms) (test frequency 300 kHz, test signal voltage > 20 mArms) (spec.) (12% + 200 Arms) (test frequency > 300 kHz, test signal voltage > 20 mArms) (test frequency 1 MHz : spec., test frequency > 1 MHz : typ.)
Setup accuracy
Constant1
Test signal level monitor function
* Test signal voltage and test signal current can be monitored. * Level monitor accuracy:
Table 32. Test signal voltage monitor accuracy (Vac)
Test signal voltage2 5 mVrms to 2 Vrms > 2 Vrms Test frequency 1 MHz > 1MHz 300 kHz > 300 kHz Specification (3% of reading value + 0.5 mVrms) (6% of reading value + 1 mVrms) (3% of reading value + 5 mVrms) (6% of reading value + 10 mVrms)3
Table 33. Test signal current monitor accuracy (Iac)
Test signal current2 50 Arms to 20 mArms > 20 mArms Test frequency 1 MHz > 1MHz 300 kHz > 300 kHz Specification (3% of reading value + 5 Arms) (6% of reading value + 10 Arms) (3% of reading value + 50 Arms) (6% of reading value + 100 Arms)
1. When auto level control function is on. 2. This is not an output value but a displayed test signal level 3. Typ. when test frequency is > 1 MHz with test signal voltage > 10 Vrms.
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DC bias signal Table 34. Test signal voltage
Range Resolution -40 V to +40 V Setup resolution: 100 V, effective resolution: 330 V (0 V - 5 V) 1 mV (5 V - 10 V) 2 mV (10 V - 20 V) 5 mV (20 V - 40 V) 0.1% + 2 mV (23 C 5 C) (0.1% + 2 mV) x 4 (0 to 18 C or 28 to 55 C) 0.1 % + 4 mV (23 C 5 C) (0.1% + 4 mV) x 4 (0 to 18 C or 28 to 55 C)
Accuracy
test signal voltage 2 Vrms
test signal voltage > 2 Vrms
Table 35. Test signal current
Range Resolution -100 mA - 100 mA Setup resolution: 1 A, effective resolution: 3.3 A (0 A - 50 mA) 10 A (50 mA - 100 mA)
DC bias voltage level monitor Vdc
(0.5% of reading value + 60 mV) x Kt When using Vdc-Idc measurement: (spec.) When using level monitor: (typ.) Kt Temperature coefficient
DC bias current level monitor Idc
(A [%] of the measurement value + B [A]) x Kt When using Vdc-Idc measurement: (spec.) When using level monitor: (typ.) A [%] B [A] Kt When the measurement time mode is SHORT: 2% When the measurement time mode is MED or LONG: 1% given below Temperature coefficient
When the measurement mode is SHORT, double the following value.
21
Table 36. Test signal voltage 0.2 Vrms (measurement time mode = MED, LONG)
DC bias current range 20 A 200 A 2 mA 20 mA 100 mA < 100 150 A 150 A 150 A 150 A 150 A Impedance range [] 100 300, 1 k 30 A 3 A 30 A 3 A 30 A 3 A 30 A 30 A 150 A 150 A 3 k, 10 k 300 nA 300 nA 3 A 30 A 150 A 30k, 100 k 45 nA 300 nA 3 A 30 A 150 A
Table 37. 0.2 Vrms < test signal voltage 2 Vrms (measurement time mode = MED, LONG)
DC bias current range 20 A 200 A 2 mA 20 mA 100 mA < 100 150 A 150 A 150 A 150 A 150 A Impedance range [] 100, 300 1k, 3 k 30 A 3 A 30 A 3 A 30 A 3 A 30 A 30 A 150 A 150 A 10k, 30 k 300 nA 300 nA 3 A 30 A 150 A 100 k 45 nA 300 nA 3 A 30 A 150 A
Table 38. Test signal voltage > 2 Vrms (measurement time mode = MED, LONG)
DC bias current range 20 A 200 A 2 mA 20 mA 100 mA 300 150 A 150 A 150 A 150 A 150 A Impedance range [] 1 k, 3 k 10k, 30 k 30 A 3 A 30 A 3 A 30 A 3 A 30 A 30 A 150 A 150 A 100 k 300 nA 300 nA 3 A 30 A 150 A
Table 39. Input impedance (nominal)
Input impedance 0 20 Conditions Other than conditions below. Test signal voltage 0.2 Vrms, Impedance range 3 k , DC bias current range 200 A Test signal voltage 2 Vrms, Impedance range 10 k, DC bias current range 200 A Test signal voltage > 2 Vrms, Impedance range = 100 k, DC bias current range 200 A
DC source signal Table 40. Test signal voltage
Range Resolution Accuracy -10 V to 10 V 1 mV 0.1% + 3 mV (23 C 5 C) (0.1% + 3 mV) x 4 (0 to 18 C or 28 to 55 C)
Table 41. Test signal current
Range -45 mA to 45 mA (nominal)
Output impedance
100 (nominal) 22
DC resistance (Rdc) accuracy Absolute measurement accuracy Aa
Absolute measurement accuracy Aa is given as Equation 15. Aa = Ae + Acal
Aa Absolute accuracy (% of reading value) Ae Relative accuracy (% of reading value) Acal Calibration accuracy
Relative measurement accuracy Ae
Relative measurement accuracy Ae is given as Equation 16. Rm Ab Rs Go Kt Ae = [Ab + (Rs /|Rm|+ Go x |Rm|) x 100 ] x Kt
Measurement value Basic accuracy Short offset [] Open offset [S] Temperature coefficient
Calibration accuracy Acal
Calibration accuracy Acal is 0.03%.
Basic accuracy Ab Table 42. Basic accuracy Ab is given below.
Measurement time mode SHORT MED Test signal voltage 2 Vrms > 2 Vrms 1.00% 2.00% 0.30% 0.60%
Open offset Go Table 43. Open offset Go is given below.
Measurement time mode SHORT MED Test signal voltage 2 Vrms > 2 Vrms 50 nS 500 nS 10 nS 100 nS
Short offset Rs Table 44. Short offset Rs is given below.
Measurement time mode SHORT MED Test signal voltage 2 Vrms > 2 Vrms 25 m 250 m 5 m 50 m
23
Effect of cable length (Short offset) Table 45. The following value is added to Rs when the cable is extended.
Cable length 1m 0.25 m 2m 0.5 m 4m 1 m
Temperature coefficient Kt Table 46. Temperature coefficient Kt is given below.
Temperature [C] 0 - 18 18 - 28 28 - 55 Kt 4 1 4
Other options
Option 002 (Bias current interface): Adds a digital interface to allow the E4980A LCR meter to control the Agilent 42841A bias current source. Option 005 (Entry model): Economy option with less measurement speed. Same measurement accuracy as the standard model. Note
Option 007 can be installed only in the E4980A with option 005.
Option 007 (Standard model): Upgrade to the standard model. Option 201 (Handler interface): Adds handler interface. Option 301 (Scanner interface): Adds scanner interface.
24
General specifications
Table 47. Power source
Voltage Frequency Power consumption 90 VAC - 264 VAC 47 Hz - 63 Hz Max. 150 VA
Table 48. Operating environment
Temperature Humidity ( 40 C, no condensation) Altitude 0 - 55 C 15% - 85% RH 0 m - 2000 m
Table 49. Storage environment
Temperature Humidity ( 60 C, no condensation) Altitude -20 - 70 C 0% - 90% RH 0 m - 4572 m
Outer dimensions: 375 (width) x 105 (height) x 390 (depth) mm (nominal)
367.4 14.4 338.6 41.8 14.4
E4980A
Preset
20 Hz - 2 MHz Precision LCR Meter
7
8
9
DC Source
DC Bias
USB
Trigger
4
5
6
1
2
3
103.8
DC Bias
0 Display Format Meas Setup
.
UNKNOWN Discharge test device before connecting 42V Peak Max Output CAT I LCUR LPOT HPOT HCUR
DC Source
55.0
Return
DC Source (Option 001) 10VDC Max
55.2
27
22
22
22
40.1
Figure 2. Dimensions (front view, with handle and bumper, in millimeters, nominal)
319.1 32.0
21.8
USB HPOT HCUR
E4980A
Preset
20 Hz - 2 MHz Precision LCR Meter
7
8
9
DC Source
Trigger
DC Bias
4
5
6
1
2
3
88.3
DC Bias
0 Display Format Meas Setup
.
LCUR
UNKNOWN Discharge test device before connecting 42V Peak Max Output CAT I LPOT
DC Source
Return
DC Source (Option 001)
Recall A
Recall B
Save/ Recall
System
Local/ Lock
55.2
27
22
22
22
30.3
Figure 3. Dimensions (front view, without handle and bumper, in millimeters, nominal)
18.0
10VDC Max
27.3
Recall A
Recall B
Save/ Recall
System
Local/ Lock
28.0
25
17.6 118.1
367.4 332.2 41.6 23.2 34.7
17.6
23.9
28.0
Serial Label
E4980A GPIB LAN 115V -230V 50/60Hz 150VA MAX Fuse T3A , 250V Option 710: No Interface Option 710: No Interface Trigger
101.6
25.7
55.0
113.9
49.3
72.3 0.4
72.3
31.1
17.1
Option 002: DC Current Control Interface
Option 301: Scanner Interface
Option 201: Handler Interface
36.2 72.3 72.3
36.2 72.3
36.2
Figure 4. Dimensions (rear view, with handle and bumper, in millimeters, nominal)
317.8 110.9
19.6
41.6
21.3
23.2
20.9
27.5
23.7
Serial Label
E4980A LAN GPIB Trigger
84.4
36.5
Fuse T3A , 250V
Option 710: No Interface
Option 710: No Interface
106.7
72.3 0.4
72.3
24.0
Option 002: DC Current Control Interface
Option 301: Scanner Interface
Option 201: Handler Interface
Figure 5. Dimensions (front view, without handle and bumper, in millimeters, nominal)
26
12.7
37
115V -230V 50/60Hz 150VA MAX
22.2
25.5
37
26.6
388.7 66.6
103.8
55.0
141.4
Figure 6. Dimensions (side view, with handle and bumper, in millimeters, nominal)
15.7
374.0 347.9
10.5
88.3
21.9
45.7 21.9
19.7 50.9
Figure 7. Dimensions (side view, without handle and bumper, in millimeters, nominal)
Weight: 5.3 kg (nominal) Display: LCD, 320 x 240 (pixels), RGB color Note
Effective pixels are more than 99.99%. There may be 0.01% (approx. 7 pixels) or smaller missing pixels or constantly lit pixels, but this is not a malfunction.
The following items can be displayed: * measurement value * measurement conditions * limit value and judgment result of comparator * list sweep table * self-test message
84.4
101.6
27
Description EMC
Supplemental Information
European Council Directive 89/336/EEC, 92/31/EEC, 93/68/EEC IEC 61326-1:1997 +A1:1998 +A2:2000 EN 61326-1:1997 +A1:1998 +A2:2001 CISPR 11:1997 +A1:1999 +A2:2002 EN 55011:1998 +A1:1999 +A2:2002 Group 1, Class A IEC 61000-4-2:1995 +A1:1998 +A2:2001 EN 61000-4-2:1995 +A1:1998 +A2:2001 4 kV CD/8 kV AD IEC 61000-4-3:1995 +A1:1998 +A2:2001 EN 61000-4-3:1996 +A1:1998 +A2:2001 3 V/m, 80-1000 MHz, 80% AM IEC 61000-4-4:1995 +A1:2001 +A2:2001 EN 61000-4-4:1995 +A1:2001 +A2:2001 1 kV power /0.5 kV Signal IEC 61000-4-5:1995 +A1:2001 EN 61000-4-5:1995 +A1:2001 0.5 kV Normal/1 kV Common IEC 61000-4-6:1996 +A1:2001 EN 61000-4-6:1996 +A1:2001 3 V, 0.15-80 MHz, 80% AM IEC 61000-4-11:1994 +A1:2001 EN 61000-4-11:1994 +A1:2001 100% 1 cycle
ICES/NMB-001
This ISM device complies with Canadian ICES-001:1998. Cet appareil ISM est conforme a la norme NMB-001 du Canada. AS/NZS 2064.1 Group 1, Class A
Safety
European Council Directive 73/23/EEC, 93/68/EEC IEC 61010-1:2001/EN 61010-1:2001 Measurement Category I, Pollution Degree 2, Indoor Use IEC60825-1:1994 Class 1 LED CAN/CSA C22.2 61010-1-04 Measurement Category I, Pollution Degree 2, Indoor Use
Environment
This product complies with the WEEE Directive (2002/96/EC) marking requirements. The affixed label indicates that you must not discard this electrical/electronic product in domestic house hold waste. Product Category: With reference to the equipment types in the WEEE Directive Annex I, this product is classed as a "Monitoring and Control instrumentation" product.
28
Supplemental Information
Settling time
Table 50. Test frequency setting time
Test frequency setting time 5 ms 12 ms 22 ms 42 ms Test frequency (Fm) Fm 1 kHz 1 kHz > Fm 250 Hz 250 Hz > Fm 60 Hz 60 Hz > Fm
Table 51. Test signal voltage setting time
Test signal voltage setting time 11 ms 18 ms 26 ms 48 ms Test frequency (Fm) Fm 1 kHz 1 kHz > Fm 250 Hz 250 Hz > Fm 60 Hz 60 Hz > Fm
Switching of the impedance range is as follows: 5 ms/ range switching
Measurement circuit protection
The maximum discharge withstand voltage, where the internal circuit remains protected if a charged capacitor is connected to the UNKNOWN terminal, is given below. Note
Discharge capacitors before connecting them to the UNKNOWN terminal or a test fixture to avoid damages to the instrument.
Table 52. Maximum discharge withstand voltage
Maximum discharge withstand voltage 1000 V 2/C V Range of capacitance value C of DUT C < 2 F 2 F C
1200 1000
Voltage [V]
800 600 400 200 0 1.E-15 1.E-13 1.E-11 1.E-09 Capacitance [F] 1.E-07 1.E-05 1.E-03
Figure 8. Maximum discharge withstand voltage
29
Measurement time
Definition
This is the time between the trigger and the end of measurement (EOM) output on the handler interface.
Conditions
Table 53 shows the measurement time when the following conditions are satisfied: * * * * * * * * Normal impedance measurement other than Ls-Rdc, Lp-Rdc, Vdc-Idc Impedance range mode: hold range mode DC bias voltage level monitor: OFF DC bias current level monitor: OFF Trigger delay: 0 s Step delay: 0 s Calibration data: OFF Display mode: blank
Table 53. Measurement time [ms](DC bias:OFF)
Measurement time mode 1 2 3 LONG MED SHORT 20 Hz 480 380 330 100 Hz 300 180 100 1 kHz 240 110 20 Test frequency 10 kHz 100 kHz 230 220 92 89 7.7 5.7
1 MHz 220 88 5.6
2 MHz 220 88 5.6
10
1
Measurement time [sec]
1. LONG 2. MED 3. SHORT
0.1
0.01
0.001
20
100
1k
10k Test frequency [Hz]
100k
1M 2M
Figure 9. Measurement time (DC bias: OFF)
30
Table 54. Measurement time when option 005 is installed [ms] (DC bias: OFF)
Measurement time mode 1 2 3 LONG MED SHORT 20 Hz 1190 1150 1040 100 Hz 650 380 240 Test frequency 1 kHz 10 kHz 590 580 200 180 37 25
100 kHz 570 180 23
1 MHz 570 180 23
2 MHz 570 180 23
10
1
1. LONG 2. MED 3. SHORT
Measurement time [sec]
0.1
0.01
0.001
20
100
1k
10k Test frequency [Hz]
100k
1M 2M
Figure 10. Measurement time (DC bias: OFF, Option 005)
When DC bias is ON, the following time is added:
Table 55. Additional time when DC bias is ON [ms]
Test frequency 20 Hz 100 Hz 30 30 1 kHz 10 10 kHz 13 100 kHz 2 1 MHz 0.5 2 MHz 0.5
When the number of averaging increases, the measurement time is given as Equation 17. MeasTime Ave AveTime MeasTime + (Ave - 1) x AveTime Measurement time calculated based on Table 53 and Table 54 Number of averaging Refer to Table 56
Table 56. Additional time per averaging [ms]
Measurement time mode SHORT MED LONG 20 Hz 51 110 210 100 Hz 11 81 210 1 kHz 2.4 88 220 Test frequency 10 kHz 100 kHz 2.3 2.3 87 85 220 220
1 MHz 2.2 84 210
2 MHz 2.2 84 210
31
Table 57. Measurement time when Vdc-Idc is selected [ms]
Test frequency 1 kHz 10 kHz 14 14 170 170 410 410
Measurement time mode SHORT MED LONG
20 Hz 210 210 410
100 Hz 46 170 410
100 kHz 14 170 410
1 MHz 14 170 410
2 MHz 14 170 410
Add the same measurement time per 1 additional average Additional Measurement time when the Vdc and Idc monitor function is ON. Add SHORT mode of Table 57. When using only Vdc or Idc, add a half of SHORT mode of Table 57.
Table 58. Measurement time when Ls-Rdc or Lp-Rdc is selected [ms]
Test frequency 1 kHz 10 kHz 43 24 300 280 700 670
Measurement time mode SHORT MED LONG
20 Hz 910 1100 1400
100 Hz 230 450 820
100 kHz 22 270 660
1 MHz 22 270 650
2 MHz 22 270 650
Add the three times of measurement time per 1 additional average number
Display time
Except for the case of the DISPLAY BLANK page, the time required to update the display on each page (display time) is as follows. When a screen is changed, drawing time and switching time are added. The measurement display is updated about every 100 ms.
Table 59. Display time
Item
MEAS DISPLAY page drawing time MEAS DISPLAY page (large) drawing time BIN No. DISPLAY page drawing time BIN COUNT DISPLAY page drawing time LIST SWEEP DISPLAY page drawing time Measurement display switching time
When Vdc, Idc monitor is OFF
10 ms 10 ms 10 ms 10 ms 40 ms 35 ms
When Vdc, Idc monitor is ON
13 ms 13 ms 13 ms 13 ms -- --
32
Measurement data transfer time
This table shows the measurement data transfer time under the following conditions. The measurement data transfer time varies depending on measurement conditions and computers.
Table 60. Measurement transfer time under the following conditions:
Host computer: Display: Impedance range mode: OPEN/SHORT/LOAD compensation: Test signal voltage monitor: DELL OPTIPLEX GX260 Pentium 4 2.6 GHz ON AUTO (The overload has not been generated.) OFF OFF
Table 61. Measurement data transfer time [ms]
Data transfer format ASCII ASCII Long Binary ASCII ASCII Long Binary ASCII ASCII Long Binary using :FETC? command (one point measurement) Comparator Comparator ON OFF 2 2 2 2 2 2 3 3 3 2 2 2 2 2 2 4 3 3 using data buffer memory (list sweep measurement) 10 51 128 201 points points points points 4 5 4 3 4 3 5 5 5 13 15 10 8 9 5 12 13 9 28 34 21 16 19 9 24 29 18 43 53 32 23 28 13 36 44 26
Interface GPIB
USB
LAN
DC bias test signal current (1.5 V/2.0 V): Output current: Max. 20 mA Option 001 (Power and DC Bias enhance): DC bias voltage: DC bias voltage applied to DUT is given as: Equation 18. Vdut = Vb - 100 x Ib
Vdut [V] DC bias voltage Vb [V] DC bias setting voltage Ib [A] DC bias current
DC bias current: DC bias current applied to DUT is given as: Equation 19. Idut [A] Vb [V] Rdc [] Idut = Vb/(100 + Rdc)
DC bias current DC bias setting current DUT's DC resistance
33
Maximum DC bias current Table 62. Maximum DC bias current when the normal measurement can be performed.
Bias current isolation Impedance range [] 0.1 1 10 100 300 1k 3k 10 k 30 k 100 k ON Auto range mode: 100 mA Hold range mode: its values for the range. Test signal voltage 2 Vrms 20 mA 20 mA 20 mA 20 mA 2 mA 2 mA 200 A 200 A 20 A 20 A OFF Test signal voltage > 2 Vrms 100 mA 100 mA 100 mA 100 mA 100 mA 20 mA 20 mA 2 mA 2 mA 200 A
When DC bias is applied to DUT
When DC bias is applied to the DUT, add the following value to the absolute accuracy Ab.
Table 63. Only when Fm < 10 kHz and |Vdc| > 5 V
SHORT 0.05% x (100 mV/Vs) x (1 + (100/Fm)) Fm [Hz] Vs [V] Test frequency Test signal voltage MED, LONG 0.01% x (100 mV/Vs) x (1 + (100/Fm))
Relative measurement accuracy with bias current isolation
When DC bias Isolation is set to ON, add the following value to the open offset Yo. Equation 20. Zm [] Fm [Hz] Vs [V] Yo_DCI1,2 [S] Idc [A] Yo_DCI1 x (1 + 1/(Vs)) x (1 + (500/Fm)) + Yo_DCI2 Impedance of DUT Test frequency Test signal voltage Calculate this by using Table 61 and 62 DC bias isolation current
Table 64. Yo_DCI1 value
DC bias current range 20 A 200 A 2 mA 20 mA 100 mA Measurement time mode SHORT 0S 0.25 nS 2.5 nS 25 nS 250 nS MED, LONG 0S 0.05 nS 0.5 nS 5 nS 50 nS
Table 65. Yo_DCI2 value
DC bias current range 20 A 200 A 2 mA 20 mA 100 mA 100 0S 0S 0S 0S 0S Measurement time mode 300 , 1 k 3 k , 10 k 0S 0S 0S 0S 0S 0S 0S 30 nS 300 nS 300 nS 30 k , 100 k 0S 0S 3 nS 30 nS 300 nS
34
DC bias settling time
When DC bias is set to ON, add the following value to the settling time:
Table 66. DC bias settling time
Bias 1 2 Standard Option 001 Settling time Capacitance of DUT x 100 x loge (2/1.8 m) + 3 m Capacitance of DUT x 100 x loge (40/1.8 m) + 3 m
100 sec
10 sec
Settling time
1 sec
100 msec
10 msec 1. 1 F 10 F 100 F 1 mF
2.
10 mF
100 mF
DUT capacitance
Figure 11. DC bias settling time
35
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Revised: July 2, 2009
Product specifications and descriptions in this document subject to change without notice. (c) Agilent Technologies, Inc. 2009 Printed in USA, July 31, 2009 5989-4435EN

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